ion pump

基本解释

A composite pump was developed which is composed of a nonevaporable getter pump and a sputtering ion pump.
结合消气剂和离子泵的各自优缺点,研制了一种由非蒸散型消气剂泵与冷阴极溅射离子泵组成的复合泵。
The electron gun,accelerator structure and klystron of accelerator operate under high vacuum condition.This article introduces the principle,structure and maintenance of Titanium sputtering ion pump.
加速器的电子枪、加速管和速调管等器件要求在高真空条件下工作。本文介绍加速中的钛溅射离子泵的原理、结构和维护方法。
The testing technique and system of the newly developed, miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry.
摘要本文介绍了小抽速微型溅射离子泵的性能测试系统和参考机械行业标准确定的测试方法，探讨了测量结果误差来源。
Newly-Developed Miniaturized Compound Sputtering Ion Pump
微型复合溅射离子泵的设计研究
Experimental Evaluation of Miniature Sputtering Ion Pump
微型溅射离子泵性能测试