heavy boron-diffusion

Heavy boron-diffusion and self-stopped etch technique is a universal means to control the thickness accurately in micromachining. It is widely used in the micromachining process of inertial devices, such as gyroscope and micro-accelerometer.
濃硼擴散腐蝕自停止工藝是微機械加工中用於精確控制厚度尺寸的常用工藝,被廣泛應用於微陀螺、微加速度計等慣性器件的加了工藝中。